Generation and annihilation of boron–oxygen-related recombination centers in compensated p- and n-type silicon

نویسندگان

  • Bianca Lim
  • Fiacre Rougieux
  • Daniel Macdonald
  • Karsten Bothe
  • Jan Schmidt
چکیده

The impact of boron–oxygen-related recombination centers as well as their defect kinetics have been intensely studied in boron-doped oxygen-rich p-type crystalline silicon. Experimental data for the defect in simultaneously boronand phosphorus-doped compensated pand n-type silicon, however, is sparse. In this study, we present time-resolved carrier lifetime measurements on Czochralski-grown silicon Cz-Si doped with both boron and phosphorus under illumination at 30 °C defect generation as well as at 200 °C in the dark defect annihilation . The defect generation in compensated n-type Cz-Si is found to proceed on a similar time scale as the defect generation in compensated p-type Cz-Si. However, the shape of the carrier lifetime reduction during defect generation in compensated n-type silicon differs considerably from that in compensated p-type Cz-Si. The defect annihilation in compensated n-type Cz-Si is found to take up to 1000 times longer than in compensated p-type Cz-Si. In addition, we confirm a linear dependence of the normalized defect concentration Nt on the net doping concentration p0 as well as a proportionality between the defect generation rate Rgen and the square of the net doping concentration p0 2 in compensated p-type Cz-Si. These results cannot be explained by the established BsO2i defect model, however, they agree with a recently proposed defect model in which the defect is composed of one interstitial boron atom and an interstitial oxygen dimer BiO2i . © 2010 American Institute of Physics. doi:10.1063/1.3511741

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تاریخ انتشار 2010